ULSI process integration 5

Author(s)

Bibliographic Information

ULSI process integration 5

editors, C.L. Claeys ... [et al.]

（ECS transactions, vol. 11, no. 6）

Electrochemical Society, c2007

Available at  / 3 libraries

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Note

Includes bibliographical references and index

Papers presented at the 5th Symposium on ULSI Process Integration at the 212th Meeting of the Electrochemical Society, Washington D.C., October 7-12, 2007

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Details

  • NCID
    BA83423796
  • ISBN
    • 9781566775724
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, N.J.
  • Pages/Volumes
    ix, 495 p.
  • Size
    23 cm
  • Parent Bibliography ID
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