Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007

著者

    • International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
    • Seller, David G.
    • National Institute of Standards and Technology (U.S.)

書誌事項

Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007

editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.]

（AIP conference proceedings, 931）

American Institute of Physics, 2007

タイトル別名

Characterization and metrology for ULSI technology

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注記

"All papers have been peer-reviewed."

Previous conferences entitled: Characterization and metrology for ULSI technology

Includes bibliographical references and indexes

System requirements for accompanying CD-ROM: Adobe Acrobat Reader, 7.0.1 or later

内容説明・目次

内容説明

This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.

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