Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

著者

• Zwicker, Gerfield
• Materials Research Society. Spring Meeting
• Advances and Challenges in Chemical Mechanical Planarization

書誌事項

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

editors, Gerfield Zwicker ... [et al.]

（Materials Research Society symposium proceedings, v. 991）

Materials Research Society, c2007

注記

"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref

Inclueds bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA83960649
• ISBN:
  • 9781558999510
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 371 p.
• 大きさ: 24 cm
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Chemical mechanical planarization -- Congresses
• 親書誌ID:
  • BA00013775