Dynamics of microelectromechanical systems
著者
書誌事項
Dynamics of microelectromechanical systems
（Microsystems / series editor Stephen D. Senturia, 17）
Springer, c2007
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.
目次
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.
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