Comprehensive microsystems
Author(s)
Bibliographic Information
Comprehensive microsystems
Elsevier, c2008
- : set
- v. 1
- v. 2
- v. 3
Available at / 18 libraries
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v. 1NB||21||C1||1200008661994,
v. 2NB||21||C1||2200008662001, v. 3NB||21||C1||3200008662010 -
v. 1549-G41-110009011642,
v. 2549-G41-210009011643, v. 3549-G41-310009011644 -
Institute for Materials Research Library, Tohoku University
v. 105070003632,
v. 205070003641, v. 305070003659 -
Toyohashi University of Technology Library図
v. 1549||GI||108900959,
v. 2549||GI||208900960, v. 3549||GI||308900961 -
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Note
Includes bibliographical references and index
Contents of Works
- v. 1. Materials
- Fabrication and packaging
- Electronics and systems design
- v. 2. Actuation mechanism
- Physical sensing
- Chemical and biological systems
- v. 3. Optical systems
- Industrial applications
- Emerging topics
