CMOS hotplate chemical microsensors
Author(s)
Bibliographic Information
CMOS hotplate chemical microsensors
（Microtechnology and MEMS）
Springer, c2007
- Other Title
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Complementary metal oxide semiconductor hotplate chemical microsensors
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Note
Includes bibliographical references (p. 113-121) and index
Description and Table of Contents
Description
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Table of Contents
Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.
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