CMOS hotplate chemical microsensors

著者

• Graf, M. (Markus)

書誌事項

CMOS hotplate chemical microsensors

M. Graf ... [et al.]

（Microtechnology and MEMS）

Springer, c2007

タイトル別名

Complementary metal oxide semiconductor hotplate chemical microsensors

注記

Includes bibliographical references (p. 113-121) and index

内容説明・目次

内容説明

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

目次

Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA84530179
• ISBN:
  • 9783540695615
• 出版国コード: gw
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Berlin
• ページ数/冊数: xii, 125 p.
• 大きさ: 24 cm
• 件名:
  • LCSH : Microelectromechanical systems -- Design and construction
  • LCSH : Microfabrication
• 親書誌ID:
  • BA51409718