Cleaning and surface conditioning technology in semiconductor device manufacturing 10
著者
書誌事項
Cleaning and surface conditioning technology in semiconductor device manufacturing 10
（ECS transactions, vol. 11,
Electrochemical Society, c2007
- : CD-ROM
- タイトル別名
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Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
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注記
"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref
Includes bibliographical references and indexes
Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
"... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM
