Proceedings of the third Symposium on Plasma Processing
著者
書誌事項
Proceedings of the third Symposium on Plasma Processing
(Proceedings / [Electrochemical Society], v. 82-6)
Electrochemical Society, c1982
- タイトル別名
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Plasma processing
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注記
Includes bibliographical references and index
"... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref
Sponsored by: the Dielectrics & Insulation Division and the Electronics Division