Proceedings of the third Symposium on Plasma Processing

Author(s)

• Symposium on Plasma Processing
• Dieleman, J.
• Frieser, R. G.
• Mathad, G. S.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the third Symposium on Plasma Processing

edited by: J. Dieleman, R.G. Frieser, G. S. Mathad

（Proceedings / [Electrochemical Society], v. 82-6）

Electrochemical Society, c1982

Other Title

Plasma processing

Note

Includes bibliographical references and index

"... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref

Sponsored by: the Dielectrics & Insulation Division and the Electronics Division

Details

• NCID: BA84886020
• LCCN: 82082859
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xi, 516 p.
• Size: 23 cm
• Classification:
  • DC : 530.44
• Subject Headings:
  • LCSH : Integrated circuits -- Large scale integration -- Congresses
• Parent Bibliography ID:
  • BA01323290