Proceedings of the third Symposium on Plasma Processing

著者

• Symposium on Plasma Processing
• Dieleman, J.
• Frieser, R. G.
• Mathad, G. S.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the third Symposium on Plasma Processing

edited by: J. Dieleman, R.G. Frieser, G. S. Mathad

（Proceedings / [Electrochemical Society], v. 82-6）

Electrochemical Society, c1982

タイトル別名

Plasma processing

注記

Includes bibliographical references and index

"... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref

Sponsored by: the Dielectrics & Insulation Division and the Electronics Division

詳細情報

• NII書誌ID(NCID): BA84886020
• LCCN: 82082859
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xi, 516 p.
• 大きさ: 23 cm
• 分類:
  • DC : 530.44
• 件名:
  • LCSH : Integrated circuits -- Large scale integration -- Congresses
• 親書誌ID:
  • BA01323290