Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

Author(s)

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Kapoor, Vikram J.
• Stein, Herman J.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 83-8）

Electrochemical Society, c1983

Other Title

Silicon nitride thin insulating films

Note

Includes bibliographical references and index

"... held May 11-13, 1983 in San Francisco, California" -- on pref

Details

• NCID: BA84901871
• LCCN: 83082039
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 519 p.
• Size: 23 cm
• Classification:
  • LCC : TK7872.T55
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
• Parent Bibliography ID:
  • BA01323290