Proceedings of the fourth Symposium on Plasma Processing

著者

• Symposium on Plasma Processing
• Electrochemical Society. Meeting
• Mathad, G. S.
• Schwartz, G. C.
• Smolinsky, G.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the fourth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 83-10）

Electrochemical Society, c1983

タイトル別名

Plasma processing

注記

Includes bibliographical references and indexes

"... was held during the Spring meeting of the Electrochemical Society, May 8-13, 1983 in San Francisco, Calif." -- on pref

詳細情報

• NII書誌ID(NCID): BA84902513
• LCCN: 83082041
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: x, 649 p.
• 大きさ: 23 cm
• 分類:
  • DC : 530.44
• 件名:
  • LCSH : Plasma engineering -- Congresses
• 親書誌ID:
  • BA01323290