Proceedings of the fourth Symposium on Plasma Processing

Author(s)

• Symposium on Plasma Processing
• Electrochemical Society. Meeting
• Mathad, G. S.
• Schwartz, G. C.
• Smolinsky, G.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the fourth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 83-10）

Electrochemical Society, c1983

Other Title

Plasma processing

Note

Includes bibliographical references and indexes

"... was held during the Spring meeting of the Electrochemical Society, May 8-13, 1983 in San Francisco, Calif." -- on pref

Details

• NCID: BA84902513
• LCCN: 83082041
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: x, 649 p.
• Size: 23 cm
• Classification:
  • DC : 530.44
• Subject Headings:
  • LCSH : Plasma engineering -- Congresses
• Parent Bibliography ID:
  • BA01323290