Proceedings of the Fifth Symposium on Plasma Processing

Author(s)

• Symposium on Plasma Processing
• Mathad, G. S.
• Schwartz, G. C.
• Smolinsky, G.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Fifth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky

（Proceedings / [Electrochemical Society], v. 85-1）

Electrochemical Society, c1985

Other Title

Plasma processing

Proceedings of the 5th Symposium on Plasma Processing

Note

Includes bibliographical references and indexes

"... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

Details

• NCID: BA84917678
• LCCN: 85070593
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 619 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Plasma etching -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
• Parent Bibliography ID:
  • BA01323290