Proceedings of the Fifth Symposium on Plasma Processing
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Proceedings of the Fifth Symposium on Plasma Processing
(Proceedings / [Electrochemical Society], v. 85-1)
Electrochemical Society, c1985
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Plasma processing
Proceedings of the 5th Symposium on Plasma Processing
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Includes bibliographical references and indexes
"... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref
Sponsored by: Dielectrics & Insulation and Electronics Divisions