Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies

著者

• Symposium on Multilevel Metallization, Interconnection, and Contact Technologies
• Electrochemical Society. Meeting
• Rothman, L. B.
• Herndon, T.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies

edited by L. B. Rothman, T. Herndon

（Proceedings / [Electrochemical Society], v. 87-4）

Electrochemical Society, Inc., c1987

タイトル別名

Multilevel metallization, interconnection, and contact technologies

注記

Includes bibliographical references and indexes

"... Oct. 21-22, 1986, as part of the 169th meeting of the Electrochemical Society held in San Diego" -- on pref

"Dielectrics and Insulation and Electronics Divisions"

詳細情報

• NII書誌ID(NCID): BA84938747
• LCCN: 87080539
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vii, 272 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Metallizing -- Congresses
• 親書誌ID:
  • BA01323290