Proceedings of the Sixth Symposium on Plasma Processing

著者

• Symposium on Plasma Processing
• Mathad, G. S.
• Schwartz, G. C.
• Gottscho, R. A.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Sixth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho

（Proceedings / [Electrochemical Society], v. 87-6）

Electrochemical Society, c1987

タイトル別名

Plasma processing

注記

Includes bibliographical references and indexes

"... held in San Diego, CA from Oct. 19-24, 1986" -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

詳細情報

• NII書誌ID(NCID): BA84940691
• LCCN: 87080742
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 754 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TA2005
  • DC19 : 621.044
• 件名:
  • LCSH : Plasma engineering -- Congresses
  • FREE : Fisica dos plasmas. larpcal
• 親書誌ID:
  • BA01323290