Proceedings of the Sixth Symposium on Plasma Processing

Author(s)

• Symposium on Plasma Processing
• Mathad, G. S.
• Schwartz, G. C.
• Gottscho, R. A.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Sixth Symposium on Plasma Processing

edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho

（Proceedings / [Electrochemical Society], v. 87-6）

Electrochemical Society, c1987

Other Title

Plasma processing

Note

Includes bibliographical references and indexes

"... held in San Diego, CA from Oct. 19-24, 1986" -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

Details

• NCID: BA84940691
• LCCN: 87080742
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 754 p.
• Size: 23 cm
• Classification:
  • LCC : TA2005
  • DC19 : 621.044
• Subject Headings:
  • LCSH : Plasma engineering -- Congresses
  • FREE : Fisica dos plasmas. larpcal
• Parent Bibliography ID:
  • BA01323290