Proceedings of the Symposium on Laser Processes for Microelectronic Applications

Author(s)

• Symposium on Laser Processes for Microelectronic Applications
• Ritsko, J. J.
• Ehrlich, Daniel J.
• 柏木, 正弘 カシワギ, マサヒロ
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Symposium on Laser Processes for Microelectronic Applications

edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi

（Proceedings / [Electrochemical Society], v. 88-10）

Electrochemical Society, c1988

Other Title

Laser processes for microelectronic applications

Note

Includes bibliographical references and index

"... held in Honolulu, Hawaii, October 21-22, 1987" -- on pref

"Dielectrics and Insulation and Electronics Divisions"

Details

• NCID: BA84957071
• LCCN: 88080925
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: vii, 251 p.
• Size: 23 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
• Parent Bibliography ID:
  • BA01323290