Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology

Author(s)

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Srinivasan, G. R.
• Plummer, J.
• Antoniadis, D.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Meeting

Bibliographic Information

Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology

edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; [sponsored by] Electronics and Dielectrics and Insulation Divisions

（Proceedings / [Electrochemical Society], v. 88-16）

Electrochemical Society, c1988

Other Title

Process physics and modeling in semiconductor technology

Note

Includes bibliographical references and indexes

"... held in San Diego, California, October 19-24, 1986, and at the General Session of the ECS 170th meeting" -- on pref

Details

• NCID: BA84979904
• LCCN: 88082250
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: vii, 303 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52/011
• Subject Headings:
  • LCSH : Semiconductors -- Mathematical models -- Congresses
• Parent Bibliography ID:
  • BA01323290