Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology

著者

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Srinivasan, G. R.
• Plummer, J.
• Antoniadis, D.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Meeting

書誌事項

Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology

edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; [sponsored by] Electronics and Dielectrics and Insulation Divisions

（Proceedings / [Electrochemical Society], v. 88-16）

Electrochemical Society, c1988

タイトル別名

Process physics and modeling in semiconductor technology

注記

Includes bibliographical references and indexes

"... held in San Diego, California, October 19-24, 1986, and at the General Session of the ECS 170th meeting" -- on pref

詳細情報

• NII書誌ID(NCID): BA84979904
• LCCN: 88082250
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vii, 303 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52/011
• 件名:
  • LCSH : Semiconductors -- Mathematical models -- Congresses
• 親書誌ID:
  • BA01323290