Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing

著者

• Symposium on Automated Integrated Circuits Manufacturing
• Anthony, Joseph B.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division

書誌事項

Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing

edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller

（Proceedings / [Electrochemical Society], v. 89-2）

Electrochemical Society, c1989

タイトル別名

Automated integrated circuits manufacturing

Proceedings of the 4th Symposium on Automated Integrated Circuits Manufacturing

Fourth International Symposium of Automated IC Manufacturing

AIM-IV

注記

Includes bibliographical references and indexes

Co-sponsored by: Electronics and Dielectrics and Insulation Divisions

"... the Fourth International Symposium of Automated IC Manufacturing (AIM-IV) held October 9-14, 1988 in Chicago, Illinois" -- on pref

詳細情報

• NII書誌ID(NCID): BA84986047
• LCCN: 88084096
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vi, 312 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Data processing -- Congresses
• 親書誌ID:
  • BA01323290