Microlithography : science and technology

著者

• Suzuki, Kazuaki
• Smith, Bruce W.

書誌事項

Microlithography : science and technology

edited by Kazuaki Suzuki, Bruce W. Smith

（Optical science and engineering, 126）

CRC Press, Taylor & Francis Group, c2007

2nd ed.

• : alk. paper

注記

Includes bibliographical references and index

HTTP:URL=http://www.loc.gov/catdir/toc/ecip071/2006031516.html Information=Table of contents only

HTTP:URL=http://www.loc.gov/catdir/enhancements/fy0701/2006031516-d.html Information=Publisher description

詳細情報

• NII書誌ID(NCID): BA85157263
• ISBN:
  • 9780824790240
• LCCN: 2006031516
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boca Raton
• ページ数/冊数: 848 p.
• 大きさ: 27 cm
• 分類:
  • LCC : TK7836
  • DC22 : 621.3815/31
• 件名:
  • LCSH : Microlithography -- Industrial applications
  • LCSH : Integrated circuits -- Masks
  • LCSH : Metal oxide semiconductors, Complementary -- Design and construction
  • LCSH : Manufacturing processes
• 親書誌ID:
  • BA75065169