Microlithography : science and technology
著者
書誌事項
Microlithography : science and technology
（Optical science and engineering, 126）
CRC Press, Taylor & Francis Group, c2007
2nd ed.
- : alk. paper
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注記
Includes bibliographical references and index
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内容説明・目次
内容説明
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts.
New in the Second EditionIn addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including:
Immersion Lithography
157nm Lithography
Electron Projection Lithography (EPL)
Extreme Ultraviolet (EUV) Lithography
Imprint Lithography
Photoresists for 193nm and Immersion Lithography
Scatterometry
Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.
Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
目次
EXPOSURE SYSTEM. System Overview of Optical Steppers and Scanners. Optical Lithography Modeling. Optics for Photolithography. Excimer Laser for Advanced Microlithography. Alignment and Overlay. Electron Beam Lithography System. X-Ray Lithography. EUV Lithography. Imprint Lithography. RESISTS AND PROCESSING. Chemistry of Photoresist Materials. Resist Processing. Multilayer Resist Technology. Dry Etching of Photoresists. METROLOGY AND NANOLITHOGRAPHY. Critical-Dimensional Metrology for Integrated-Circuit Technology. Electron Beam Nanolithography. Index.
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