Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California

著者

• Advances in resist technology and processing
• Tarascon-Auriol, R. G.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California

Régine G. Tarascon-Auriol chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3049）

SPIE, c1997

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA85952051
• ISBN:
  • 0819424633
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xv, 1028 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X