Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California

Author(s)

• Microelectronic Device Technology
• Burnett, David
• Wristers, Dirk
• Tsuchiya, Toshiaki
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

Bibliographic Information

Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California

David Burnett, Dirk Wristers, Toshiaki Tsuchiya, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3506）

SPIE, c1998

Note

Includes bibliographical references and author index

Description and Table of Contents

Description

A collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.

by "Nielsen BookData"

Details

• NCID: BA85960118
• ISBN:
  • 0819429651
• LCCN: 99184109
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: vii, 356 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors Congresses
  • LCSH : Semiconductors -- Design and construction Congresses
  • LCSH : Microelectronics Congresses
• Parent Bibliography ID:
  • BA0022700X