Advances in microelectronic device technology : 7-9 November 2001, Nanjing, China

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Advances in microelectronic device technology : 7-9 November 2001, Nanjing, China

Qin-Yi Tong, Ulrich M. Goesele, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4600）

SPIE, c2001

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"First International Conference on Advanced Microelectronic/Optoelectronic Device Technology ... part of SPIE International Symposium on Optoelectronics and Microelectronics"--P. xi

Includes bibliographical references and index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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