Advanced microlithography technologies : 8-10 November, 2004, Beijing, China

Author(s)

• Advanced Mcrolithography Technologies
• Wang, Yangyuan
• Yao, Jun'en
• Progler, Christopher J.
• Society of Photo-optical Instrumentation Engineers
• Chinese Optical Society
• Australian Optical Society
• National Natural Science Foundation of China

Bibliographic Information

Advanced microlithography technologies : 8-10 November, 2004, Beijing, China

Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5645）

SPIE, c2005

Other Title

Microlithography technologies

Note

Includes bibliographical references and author index

Details

• NCID: BA85977573
• ISBN:
  • 0819456004
• LCCN: 2005299112
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xi, 380 p.
• Size: 28 cm
• Classification:
  • LCC : TK7872.M3
  • DC22 : 621.3815/31
• Subject Headings:
  • LCSH : Microlithography -- Congresses
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : X-ray lithography -- Congresses
  • LCSH : Manufacturing processes -- Congresses
• Parent Bibliography ID:
  • BA0022700X