Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Author(s)

• Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)
• Courtois, B. (Bernard)
• Demidenko, S. N. (Sergeĭ Nikolaevich)
• Society of Photo-optical Instrumentation Engineers
• IREE Society
• Queensland. Government State Development

Bibliographic Information

Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3893）

SPIE, c1999

Note

Includes bibliographical references and index

Details

• NCID: BA86009862
• ISBN:
  • 0819434949
• LCCN: 00501398
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 512 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X