Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

著者

• Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)
• Courtois, B. (Bernard)
• Demidenko, S. N. (Sergeĭ Nikolaevich)
• Society of Photo-optical Instrumentation Engineers
• IREE Society
• Queensland. Government State Development

書誌事項

Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3893）

SPIE, c1999

注記

Includes bibliographical references and index

内容説明・目次

内容説明

These papers on microelectromechanical systems (MEMS) and microelectronics cover issues relevant to their design, characterization and packaging.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA86009862
• ISBN:
  • 0819434949
• LCCN: 00501398
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 512 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• 親書誌ID:
  • BA0022700X