Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Author(s)

• Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)
• Courtois, B. (Bernard)
• Demidenko, S. N. (Sergeĭ Nikolaevich)
• Society of Photo-optical Instrumentation Engineers
• IREE Society
• Queensland. Government State Development

Bibliographic Information

Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3893）

SPIE, c1999

Note

Includes bibliographical references and index

Description and Table of Contents

Description

These papers on microelectromechanical systems (MEMS) and microelectronics cover issues relevant to their design, characterization and packaging.

by "Nielsen BookData"

Details

• NCID: BA86009862
• ISBN:
  • 0819434949
• LCCN: 00501398
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 512 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X