Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

Author(s)

• Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)
• Franzon, Paul D.
• Society of Photo-optical Instrumentation Engineers
• United States. Air Force. Asian Office of Aerospace Research and Development
• Institute of Electrical and Electronics Engineers. South Australia Section

Bibliographic Information

Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization IEEE South Australia Section

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4593）

SPIE, c2001

Note

Includes bibliographic references and author index

Details

• NCID: BA86009975
• ISBN:
  • 0819443239
• LCCN: 2002279639
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 322 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X