Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA

- Design, Process Integration, and Characterization for Microelectronics (Conference)
- Starikov, Alexander
- Tobin, Kenneth W.
- Society of Photo-optical Instrumentation Engineers

著者

- Design, Process Integration, and Characterization for Microelectronics (Conference)
- Starikov, Alexander
- Tobin, Kenneth W.
- Society of Photo-optical Instrumentation Engineers

Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4692）

SPIE, c2002

Includes bibliographical references and index