Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France

Author(s)

• Design, Test, Integration, and Packaging of MEMS/MOEMS (Conference)
• Courtois, B. (Bernard)
• Centre national de la recherche scientifique (France)

Bibliographic Information

Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France

Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4755）

SPIE, c2002

Note

Includes bibliographical references and index

Description and Table of Contents

Description

This volume examines the design, test, integration and packaging of MEMS/MOEMS 2002.

by "Nielsen BookData"

Details

• NCID: BA86010806
• ISBN:
  • 0819445185
• LCCN: 2002510518
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xvii, 832 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X