Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Author(s)
Bibliographic Information
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4755）
SPIE, c2002
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
This volume examines the design, test, integration and packaging of MEMS/MOEMS 2002.
by "Nielsen BookData"
