Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

著者

• Device and Process Technologies for MEMS and Microelectronics (Conference)
• Chau, Kevin
• Dimitrijev, Sima
• Society of Photo-optical Instrumentation Engineers
• Institution of Radio and Electronics Engineers, Australia
• Queensland. Government State Development
• Griffith University Microelectronics Engineering Society

書誌事項

Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3892）

SPIE, c1999

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA86012776
• ISBN:
  • 0819434930
• LCCN: 00702718
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vii, 394 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photon detectors -- Design and construction -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
• 親書誌ID:
  • BA0022700X