Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Author(s)

• Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference)
• Chiao, Jung-Chih
• Society of Photo-optical Instrumentation Engineers
• University of Western Australia
• Defence Science and Technology Organisation (Australia)

Bibliographic Information

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5276）

SPIE, c2004

Other Title

Device and process technologies for MEMS and microelectronics

Note

Includes bibliographical references and index

Description and Table of Contents

Description

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

by "Nielsen BookData"

Details

• NCID: BA86012925
• ISBN:
  • 081945169X
• LCCN: 2004304163
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xxxiv, 566 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photonics -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X