Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
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Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 6037)
SPIE, c2006
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注記
Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics
Includes bibliographical references and index
