Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia

著者

• Device and Process Technologies for Microelectronics, MEMS, and Photonics (Conference)
• Chiao, Jung-Chih
• Society of Photo-optical Instrumentation Engineers
• Queensland University of Technology
• University of Adelaide
• University of Adelaide. Centre for Biomedical Engineering

書誌事項

Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia

Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Queensland University of Technology (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6037）

SPIE, c2006

注記

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index

• NII書誌ID(NCID): BA86013134
• ISBN:
  • 0819460680
• LCCN: 2006282918
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 624.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photonics -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
• 親書誌ID:
  • BA0022700X