ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
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ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 6032)
SPIE, c2006
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MEMS, MOEMS, and NEMS
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Includes bibliographical references and author index