ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

Bibliographic Information

ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

Masayoshi Esashi, Zhaoying Zhou, chairs/editors ; organized by ICO--International Commission for Optics ...[et al.] ; sponsored by AFOSR Asia Office ... [et al.] ; published by SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 6032)

SPIE, c2006

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MEMS, MOEMS, and NEMS

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Includes bibliographical references and author index

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