Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia

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書誌事項

Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia

Fred Payne, Ash M. Parameswaran, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3894)

SPIE, c1999

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This collection of papers examines education in microelectronics and microelectromechanical systems (MEMS).

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    SPIE -- the International Society for Optical Engineering

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