Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA

著者

• Knystautas, Emile J.
• Kirk, Wiley P.
• Browning, Valerie M.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA

Emile J. Knystautas, Wiley P. Kirk, Valerie Browning, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4468）

SPIE, c2001

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA86049481
• ISBN:
  • 0819441821
• LCCN: 2002277824
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 192 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA418.9.T45
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Thin films -- Congresses
  • LCSH : Thin films -- Effect of radiation on -- Congresses
  • LCSH : Ion bombardment -- Industrial applications -- Congresses
  • LCSH : Molecular electronics -- Congresses
• 親書誌ID:
  • BA0022700X