EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

著者

• European Conference on Mask Technology for Integrated Circuits and Microcomponents
• Behringer, Uwe F. W.
• VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
• Institut für Mikrostrukturtechnik
• SEMI-Europe
• Society of Photo-optical Instrumentation Engineers

書誌事項

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5835）

SPIE , VDE Verlag GmbH, c2005

タイトル別名

European Mask and Lithography Conference

European Conference on Mask Technology for Integrated Circuits and Microcomponents

Mask and lithography

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BA8605470X
• ISBN:
  • 0819458309
• LCCN: 2006273846
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.,,Berlin, Germany
• ページ数/冊数: xxx, 302 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X