Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA

Author(s)

• Descour, Michael R.
• Rantala, Juha T.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA

Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4284）

SPIE, c2001.s

Note

Includes bibliographical references and index

• NCID: BA86064918
• ISBN:
  • 0819439622
• LCCN: 2002265872
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xxx, 152 p.
• Size: 28 cm
• Classification:
  • LCC : TK8300
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
• Parent Bibliography ID:
  • BA0022700X