Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA
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Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4284)
SPIE, c2001.s
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Includes bibliographical references and index