Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA
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Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4647）
SPIE, c2002
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Functional integration of opto-electro-mechanical devices and systems 2
Functional integration of opto-electro-mechanical devices and systems two
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Includes bibliographical references and index
