Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
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Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4830)
SPIE, c2003
- Other Title
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Laser precision microfabrication
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Includes bibliographical references and author index