Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany

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Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany

Isamu Miyamoto ... [et al.] chairs/editors ; organized by JLPS--Japan Laser Processing Society ... [et al.] ; cooperating organizations JSPE--the Japan Society for Precision Engineering ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5063)

SPIE, c2003

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Laser precision microfabrication

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Includes bibliographical references and author index

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