Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
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Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5063)
SPIE, c2003
- Other Title
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Laser precision microfabrication
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Includes bibliographical references and author index
