Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing
著者
書誌事項
Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing
(ECS transactions, vol. 13,
The Electrochemical Society, c2008
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注記
Includes bibliographical references and indexes
Other editors: H. Iwai, Y. Obeng, T. Chikyow, J. Vanhellemont
"Presented at the Third International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Rreliability and Manufacturing held on May 18-22, 2008 in Phoenix, Arizona as a part of the 213th Meeting of the Electrochemical Society (ECS)." --on pref.