Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.

Author(s)

• LaVan, David A.
• da Silva, Mark G.
• Spearing, S. Mark
• Vengallatore, Srikar

Bibliographic Information

Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.

editors, David A. LaVan ... [et al.]

（Materials Research Society symposium proceedings, v. 1052）

Materials Research Society, c2008

Note

Includes index

Other editors: Mark G. da Silva, S. Mark Spearing, Srikar Vengallatore

Details

• NCID: BA86491577
• ISBN:
  • 9781558999909
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale
• Pages/Volumes: xi, 325 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775