X-ray metrology in semiconductor manufacturing

Author(s)

• Bowen, D. Keith (David Keith)
• Tanner, B. K. (Brian Keith)

Bibliographic Information

X-ray metrology in semiconductor manufacturing

D. Keith Bowen, Brian K. Tanner

CRC/Taylor & Francis, 2006

Note

Includes bibliographical references and index

Details

• NCID: BA87337459
• ISBN:
  • 0849339286
• LCCN: 2005052196
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton
• Pages/Volumes: 279 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874.58
  • DC22 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction -- Quality control
  • LCSH : Integrated circuits -- Measurement
  • LCSH : Semiconductor wafers -- Inspection
  • LCSH : X-rays -- Diffraction
  • LCSH : Fluroscopy