Microelectronics fabrication equipment 1966-67

Author(s)

• Dummer, G. W. A. (Geoffrey William Arnold)
• Robertson, J. Mackenzie

Bibliographic Information

Microelectronics fabrication equipment 1966-67

edited by G.W.A. Dummer and J. Mackenzie Robertson

Pergamon Press, c1966

Details

• NCID: BA87873400
• LCCN: 66012955
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Oxford
• Pages/Volumes: xi, 531 p.
• Size: 28 cm