Reliability of MEMS

Author(s)

• Tsuchiya, Toshiyuki
• Tabata, Osamu

Bibliographic Information

Reliability of MEMS

edited by Osamu Tabata and Toshiyuki Tsuchiya

（Advanced micro & nanosystems, v.6）

Wiley-VCH, c2008

Note

Includes bibliographical references and index

Details

• NCID: BA88629289
• ISBN:
  • 9783527314942
• LCCN: 2008459617
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xx, 303 p.
• Size: 25 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Reliability
• Parent Bibliography ID:
  • BA70371204