Proceedings of the 3rd Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments, Octber 9-10, 2002, Hotel Yumoto Fujiya, Hakone, Japan

Author(s)

• Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
• 日本学術振興会 ニホン ガクジュツ シンコウカイ
• Hanʾguk Kwahak Chaedan

Bibliographic Information

Proceedings of the 3rd Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments, Octber 9-10, 2002, Hotel Yumoto Fujiya, Hakone, Japan

sponsored by JSPS and KOSEF

[JSPS], 2002

Details

• NCID: BA88689848
• Country Code: ja
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [s.l.]
• Pages/Volumes: 306 p.
• Size: 30 cm